Name: Silicon Nitride (Si₃N₄) Substrates
Brand: INNOVACERA

Silicon Nitride (Si₃N₄) Substrates

Innovacera’s Silicon Nitride (Si₃N₄) Substrates combine exceptional thermal conductivity, high mechanical strength, and excellent fracture toughness, providing outstanding reliability for high-power electronic and thermal management applications. With a thermal expansion coefficient closely matched to silicon and superior resistance to thermal shock, these substrates maintain stable performance under extreme conditions. Their precision-engineered surfaces and customizable specifications make them ideal for IGBT power modules, high-power heat sinks, and advanced wireless modules.

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Features

High thermal conductivity
Thermal expansion coefficient close to silicon wafer
High strength and toughness

Application

High power IGBT power module
High power heat sink
Wireless module

Material Properties Table

Project		Test conditions	Unit	Si₃N₄
Project		Test conditions	Unit	SN-90
Material		-	-	Si₃N₄
Appearance		-	-	grey
Surface roughness		Ra	μm	0.2~0.75
Density		-	g/cm 3	≥3.2
Physical properties	Bending strength	3 -point bending resistance	MPa	≥750
	Vickers hardness	Load 4.9	GPa	≥14
	Water absorption	-	%	0
Thermal performance	Thermal conductivity	25℃	W/(m·k)	≥85
	Linear thermal expansion coefficient	25-500℃	x10 -6 mm/℃	2~4
	Thermal shock resistance	800℃	Time	≥10
	Specific heat	-	J/(kg·K)	680
Electrical properties	Dielectric constant	1MHz/25℃	-	7~8
	Dielectric loss	1MHz/25℃	x10 -4	≤4
	Volume resistivity	25℃	Ω·cm	> 10 14
	Breakdown voltage	-	kV/mm	> 15
Light performance	Reflectivity	Reflectivity meter	-	-
Light performance	Whiteness	Whiteness meter	-	-

Specifications and Dimensions

Material	Unit	Al₂O₃	ZTA	AlN	Si₃N₄
Effective dimensions ( A , B )	mm	50.8-190	50.8-190	50.8-190	138*190
Thickness ( T )	mm	0.25-1.5	0.25-1.5	0.25-1.0	0.25 , 0.32
Thickness tolerance	mm	±5% ( Min±0.03mm )	±5% ( Min±0.03mm )	±5% ( Min±0.03mm )	±5% ( Min ±0.03mm )
Warpage ( C )	mm	≤0.3%	≤0.3%	≤0.3%	≤0.3%
surface roughness	μm	0.2-0.6	0.2-0.5	0.2-0.75	0.2-0.75
Size, thickness and surface roughness can be customized

Processing

• Laser processing

Laser processing diagram

• Grinding and polishing sheet roughness table

Grinding and polishing sheet roughness table diagram

Project		Qualified		Special Grade
Internal dimension tolerance		±0.05mm		±0.03mm
External dimension tolerance		±0.15mm		±0.1mm
Hole tolerance (φ0.07-0.15mm)		±0.05mm		±0.02mm
Hole tolerance (φ ＞ 0.15mm)		±0.1mm		±0.02mm
Project	Surface roughness (μm )
	Qualified		Special Grade
Grinding	0.3-0.6		0.3-0.5
Fine grinding	0.1-0.4		0.1-0.3
Polishing	≤0.1		≤0.05

How to get a quote?

We will support your project with the required technical and developmental support