Ceramic Vacuum Feedthrough
Innovacera’s ceramic-to-metal sealing components such as ceramic vacuum feedthroughs are made of high-purity alumina ceramic and precisely machined metal rods. The permanent is high-strength and ultra-high gas-tight sealing connection is achieved through a high-temperature vacuum brazing process.
Structure and Materials
- Ceramic insulator:High-purity alumina ceramic, featuring excellent electrical insulation, high-temperature resistance and chemical stability - Metal pins / rods:Stainless steel, molybdenum, Kovar or nickel-based alloys (optional), meeting different thermal expansion matching requirements - Sealing method:Vacuum brazing (metal-ceramic eutectic brazing), forming a permanent gas-sealed connection - Structural form:Multi-pin design (2-pin / 3-pin / 4-pin and custom), axial or flange-type structure options availableAdvantage:
- Excellent vacuum sealing performance - Strong resistance to high temperatures and thermal cycling - High insulation properties - Long-term reliability - Highly customizableTypical Application
- Vacuum furnaces and high-temperature vacuum heating systems - Vacuum coating and plasma equipment - Semiconductor and research vacuum devices - High vacuum sensors and electro-vacuum componentsTechnical Specifications:
| Item | Specification |
| Ceramic Material | ≥95% Alumina |
| Sealing Process | High-temperature vacuum brazing |
| Operating Vacuum | High vacuum / Ultra-high vacuum |
| Leak Rate | ≤10⁻⁹ mbar·L/s |
| Operating Temperature | Up to 300–800°C (structure-dependent) |
| Pin Count | 1–4 pins (customizable) |
| Insulation Resistance | ≥10⁹ Ω |
| Mounting Type | Flange / Feedthrough / Custom |
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