INNOVACERA

Porous Ceramic Chuck Table

The electrostatic microporous ceramic chuck is a key part of the deep silicon etching machine. The electrostatic adsorption technology used is an advantageous technology that replaces the traditional …

The dicing vacuum chuck table can be made more than 12 inches, according to customer requirements with different shape like the disc, square and irregular shape.The size of thinning vacuum chuck can b…

The ceramic chuck table is applied to the fields of silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinnin…