News

Boron Nitride Ceramics (BN) Parts For Plasma  Chambers

Boron Nitride is often referred to as “white graphite” since it has similar layer structure as graphite. They have excellent high temperature resistance properties, including high dielectric strength, thermal conductivity and excellent chemical inertness, which can solve the challenges of some of the most demanding application fields.

 

Boron nitride ceramics (BN) are unique in plasma environments for their resistance to sputtering and low propensity to generate secondary ions, even in the presence of strong electromagnetic fields. Sputter resistance helps extend component life, while low secondary ion generation helps maintain the integrity of the plasma environment. Therefore, boron nitride ceramics (BN) are widely used to confine the plasma arc in the sputtering chamber to the target material and prevent the erosion of integral components in the process chamber.

 

BN components

 

Boron Nitride’s (BN) main products for plasma application include arc shields and guides, target frames, shields and gaskets used in the manufacture of PVD plasma chambers. At the same time, boron nitride (BN) ceramics are also used in Hall-effect thrusters using plasma as a propulsion method for orbiting satellites and deep space probes.

 

If you want to learn more about our boron nitride and composite boron nitride and how they can benefit your operation, please contact us today!

Related articles

高压射频馈通解决方案:带法兰安装的HN型同轴连接器

高压射频馈通解决方案:HN型法兰安装同轴连接器 在高压射频系统中,信号传输的稳定性和面板接口的可靠性对系统性能至关重要。HN型法兰安装同轴连接器专为高压射频信号传输而设计,适用于需要牢固安装在面板或机柜壁上的应用。 该射频同轴连接器采用螺纹…

Back