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January 01,1970
Ceramic Packaging for Micro Electro Mechanical Systems (MEMS): Solutions for Harsh Environments
Unlike single-function devices made by traditional manufacturing techniques, Micro Electro Mechanical Systems (MEMS) is a micro-sized controllable electromechanical device system that integrates micro-mechanical structures, sensors, actuators, and electronic components. This type of product has numerous advantages, including small size, light weight, low cost, low power consumption, high reliability, mass producibility, easy integration, and intelligent implementation.