Alumina Ceramic Base
Alumina Ceramic (Al₂O₃) base and nozzles are widely used in semiconductor process equipment such as implanter equipment and electron generator components due to their excellent electrical, thermal and mechanical properties. The Alumina Ceramic Base have very good electrical insulation and high thermal conductivity, these let it play a very important roles in the semiconductor industry.
| Item | Test Condition | Unit&Symbol | 95% Al2O3 | 99% Al2O3 | 99.7% Al2O3 |
| The main chemical ingredient | Al2O3 | Al2O3 | Al2O3 | ||
| Bulk Density | g/cm3 | 3.6 | 3.89 | 3.96 | |
| Maximum Use Temperature | 1450°C | 1600°C | 1650°C | ||
| Water absorption | % | 0 | 0 | 0 | |
| ROHS Hardness | ≥85 | ≥89 | ≥89 | ||
| Flexural strength | 20° C | MPa (psi x 103) | 358 (52) | 550 | 550 |
| Compressive Strength | 20° C | MPa (psi x 103) | 2068 (300) | 2600(377) | 2600(377) |
| Fracture Toughness | K(I c) | Mpa m1/2 | 4 - 5 | 5.6 | 6 |
| Coefficient of thermal expansion | 25-1000° C | 1X 10-6/°C | 7.6 | 7.9 | 8.2 |
| Coefficient of thermal conductivity | 20° C | W/m °K | 16 | 30 | 30.4 |
| Thermal Shock Resistance | Tc | °C | 250 | 200 | 200 |
| Dielectricity constant | 1MHz.25°C | 9 | 9.7 | 9.7 | |
| Dielectric strength | ac-kV/mm (ac V/mil) | 8.3 (210) | 8.7 (220) | 8.7 (220) | |
| Volume Resistivity | 100°C | ohm-cm | > 10^13 | > 10^14 | > 10^14 |
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